Single Side Polished Quartz Plate 200x250x6mm High Purity For Semiconductor Wafer Carrier Optical Coating Fixture

Single Side Polished Quartz Plate 200x250x6mm

This single side polished quartz plate, sized 200x250x6mm, features one precision optical polished surface with the opposite side left ground for stable positioning. Manufactured from high purity quartz, it delivers 1100°C heat resistance and superior chemical durability—ideal for semiconductor wafer carriers, optical experiment substrates, vacuum coating fixtures and laboratory high-temperature tooling.

Product Parameters

Key Features

• Single Side Optical Polished – One surface precision mirror-polished for excellent light transmission and optical clarity, while the ground reverse side provides stable positioning and mounting.
• 1100°C Heat Resistance – Maintains structural integrity and dimensional stability at sustained high temperatures without deformation, ideal for semiconductor wafer processing and diffusion operations.
• HF & Strong Chemical Resistance – Superior to borosilicate glass, withstands hydrofluoric acid and concentrated acids/alkalis for demanding semiconductor and chemical processing environments.
• High Purity, No Contamination – 99.99% pure quartz with zero metal impurity precipitation, preventing wafer and sample contamination in high-purity semiconductor manufacturing.
• Low Thermal Expansion – Excellent thermal shock resistance prevents cracking under rapid temperature cycling, ensuring reliable long-term service in cyclic heating applications.

Applications

1. Semiconductor & PV Industry

Wafer carrier plate for chip coating and diffusion processes. The polished surface supports wafers without contamination, maintaining dimensional stability at high processing temperatures without impurity shedding.

2. Optical Instrument Industry

Reference substrate for spectrum testing and optical path fixing base plate. The polished surface ensures clear light transmission while the non-polished side provides stable positioning and mounting.

3. Precision Coating Process

Vacuum coating base fixture for optical lens deposition, resistant to high chamber temperatures and corrosive process gases during thin-film coating operations.

4. Chemical Laboratory

High-temperature sintering tray and corrosion test sample carrier, compatible with HF and various strong corrosive reagents for demanding chemical experiments.

Advantages over Borosilicate Glass

Unlike borosilicate glass plates that are attacked by HF and soften at high temperatures, this single-side polished quartz plate offers full HF resistance, sustained 1100°C operation, mirror-grade surface finish for superior light transmission, low thermal expansion for crack resistance, and high purity construction for contamination-free semiconductor and precision manufacturing environments.