Shallow Groove Glass Suction Chuck 265x9mm Vacuum Holding Plate For Semiconductor Wafer Optical Lens Coating

Shallow Groove Glass Suction Chuck Φ265x9mm Vacuum Holding Plate

This shallow groove glass suction chuck, sized Φ265x9mm, features a precisely formed shallow groove pattern for uniform vacuum distribution. With superior flatness, excellent air tightness and high transmittance, it provides stable vacuum holding for semiconductor wafers, optical lens processing, automated glass manufacturing and laboratory precision testing applications.

Product Parameters

Key Features

• Precision Shallow Groove Design – Precision formed shallow groove pattern ensures uniform vacuum air distribution across the entire chuck surface for stable and balanced workpiece holding.
• Superior Flatness – Precision ground surface with excellent flatness prevents workpiece warping and edge lifting during vacuum holding and processing operations.
• Excellent Air Tightness – High-quality vacuum sealing performance maintains consistent negative pressure for reliable adsorption of 5/6/8-inch wafers and optical components.
• Wear & Chemical Resistance – Durable glass surface resists grinding fluid and cutting fluid corrosion, with anti-aging properties for extended service life compared to plastic alternatives.
• High Transmittance – Clear glass construction allows visual inspection and optical alignment during vacuum processing operations.

Applications

1. Semiconductor Industry

Vacuum chuck for wafer dicing, coating and transfer operations. The shallow groove provides uniform air distribution for stable adsorption of 5/6/8-inch wafers, preventing silicon wafer scratching and damage.

2. Optical Component Processing

Vacuum carrier chuck for optical glass and lens grinding and coating processes, applying uniform negative pressure to prevent workpiece edge warping and deformation during precision machining.

3. Automated Glass Deep Processing

Vacuum positioning chuck for photovoltaic glass and cover glass cutting and screen printing stations, resistant to cutting fluid corrosion for reliable production line operation.

4. Laboratory Precision Testing

Vacuum fixation base for optical sample testing, providing sealed negative pressure holding for spectrum analysis and light transmission measurement with stable sample positioning.

Advantages over Resin/Plastic Suction Plates

Compared to plastic resin suction plates, this glass chuck offers superior dimensional precision, high temperature resistance without deformation or aging, excellent resistance to grinding fluids and weak acid cleaning, and a wear-resistant surface for significantly longer service life—making it the preferred choice for high-precision vacuum adsorption processes in semiconductor and optical manufacturing.