Semi Circular Groove Fused Quartz Substrate 4×3.6×185mm Precision Machined

Semi Circular Groove Fused Quartz Substrate 4x3.6x185mm

This precision machined semi circular groove fused quartz substrate, sized 4x3.6x185mm, features a precision milled semicircular groove on a finely ground quartz base. Engineered from high purity fused quartz, it combines 1100°C temperature resistance with exceptional chemical inertness, making it ideal for vision system bases, optical component fixtures, semiconductor coating jigs and laboratory microfluidic applications.

Product Parameters

Key Features

• Precision Milled Semi-Circular Groove – High-precision CNC machined groove with consistent cross-sectional profile along the full 185mm length, ensuring reliable component positioning and fluid guidance.
• High Purity Fused Quartz – 99.99% pure quartz material with minimal impurity content, suitable for demanding semiconductor and optical processing environments.
• 1100°C Temperature Resistance – Maintains structural integrity and dimensional stability at continuous operating temperatures up to 1100°C, far exceeding plastic and metal alternatives.
• Superior Chemical Resistance – Resistant to hydrofluoric acid, strong acids and corrosive cleaning solutions commonly used in semiconductor fabrication processes.
• Low Thermal Expansion – Minimal dimensional change under temperature cycling, maintaining precise groove dimensions and substrate flatness across operating conditions.

Applications

1. Machine Vision Light Source Base

Slot-type LED light bar positioning base. The semicircular groove securely holds LED strips for uniform light distribution and precise optical alignment in industrial vision inspection systems.

2. Optical Component Fixture

Optical lens and component carrying substrate. The semicircular groove provides mechanical restraint to prevent sliding and misalignment of optical elements during assembly and operation.

3. Semiconductor Coating Jig

Coating process tooling with slot for wire routing or gas venting. The groove design allows workpieces to be suspended above the substrate for uniform film deposition with improved process access.

4. Laboratory Microfluidic Guide Base

Micro-volume reagent guide channel base. The precision semicircular groove serves as a capillary channel for controlled liquid flow in analytical and research applications.

Advantages over Plastic Substrates

Compared to plastic-based grooved substrates, this fused quartz version offers unparalleled thermal stability with no deformation at elevated temperatures, superior chemical resistance to process solvents and cleaning agents, and precision groove tolerances from integral CNC machining that ensure tight component fit and reliable repeatability.